Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833161 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Shulin Wang, Ulrich Kroemer, Lee Luo, Ming Li | 2004-12-21 |
| 6713127 | Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD | Janardhanan Anand Subramony, Yoshitaka Yokota, Ramaseshan Iyer, Lee Luo | 2004-03-30 |