Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713127 | Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD | Janardhanan Anand Subramony, Yoshitaka Yokota, Lee Luo, Aihua Chen | 2004-03-30 |