Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825618 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Hongching Shan, Kenny L. Doan, Mike Welch, Richard R. Mett | 2004-11-30 |
| 6797639 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Bryan Pu, Hongching Shan +3 more | 2004-09-28 |
| 6793835 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Brian Sy-Yuan Shieh, Gerald Yin | 2004-09-21 |
| 6787475 | Flash step preparatory to dielectric etch | Zhuxu Wang, Jingbao Liu, Bryan Pu | 2004-09-07 |
| 6716302 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Bryan Pu, Hongching Shan +3 more | 2004-04-06 |
| 6686293 | Method of etching a trench in a silicon-containing dielectric material | Yunsang Kim, Kenny L. Doan, Hongqing Shan | 2004-02-03 |