Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6686293 | Method of etching a trench in a silicon-containing dielectric material | Kenny L. Doan, Claes Bjorkman, Hongqing Shan | 2004-02-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6686293 | Method of etching a trench in a silicon-containing dielectric material | Kenny L. Doan, Claes Bjorkman, Hongqing Shan | 2004-02-03 |