Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825618 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Hongching Shan, Claes Bjorkman, Mike Welch, Richard R. Mett | 2004-11-30 |
| 6686293 | Method of etching a trench in a silicon-containing dielectric material | Yunsang Kim, Claes Bjorkman, Hongqing Shan | 2004-02-03 |