Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827869 | Method of micromachining a multi-part cavity | Dragan Podlesnik, Thorsten Lill, Jeff Chinn, Shaoher X. Pan, Maocheng Li +1 more | 2004-12-07 |
| 6802933 | Apparatus for performing self cleaning method of forming deep trenches in silicon substrates | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2004-10-12 |
| 6759340 | Method of etching a trench in a silicon-on-insulator (SOI) structure | Padmapani Nallan, Ajay Kumar, Chan Syun David Yang | 2004-07-06 |
| 6696365 | Process for in-situ etching a hardmask stack | Ajay Kumar, Sanjay Thekdi, Dragan Podlesnik | 2004-02-24 |