Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827869 | Method of micromachining a multi-part cavity | Thorsten Lill, Jeff Chinn, Shaoher X. Pan, Anisul Khan, Maocheng Li +1 more | 2004-12-07 |
| 6808647 | Methodologies to reduce process sensitivity to the chamber condition | Songlin Xu, Zhiwen Sun, Xueyu Qian | 2004-10-26 |
| 6802933 | Apparatus for performing self cleaning method of forming deep trenches in silicon substrates | Anisul Khan, Ajay Kumar, Jeffrey D. Chinn | 2004-10-12 |
| 6696365 | Process for in-situ etching a hardmask stack | Ajay Kumar, Anisul Khan, Sanjay Thekdi | 2004-02-24 |