Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806095 | Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers | Padmapani Nallan, Guangxiang Jin | 2004-10-19 |
| 6802933 | Apparatus for performing self cleaning method of forming deep trenches in silicon substrates | Anisul Khan, Jeffrey D. Chinn, Dragan Podlesnik | 2004-10-12 |
| 6804381 | Method of and device for inspecting images to detect defects | Kwok-Hung Grantham Pang | 2004-10-12 |
| 6767821 | Method for fabricating an interconnect line | Chan Syun David Yang, Wei Wu, Changhun Lee, Yeajer Arthur Chen, Katsuhisa Kugimiya | 2004-07-27 |
| 6767824 | Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask | Padmapani Nallan, Guangxiang Jin, Wei Liu | 2004-07-27 |
| 6759286 | Method of fabricating a gate structure of a field effect transistor using a hard mask | Padmapani Nallan | 2004-07-06 |
| 6759263 | Method of patterning a layer of magnetic material | Chentsau Ying, Xiaoyi Chen, Padmapani Nallan | 2004-07-06 |
| 6759340 | Method of etching a trench in a silicon-on-insulator (SOI) structure | Padmapani Nallan, Anisul Khan, Chan Syun David Yang | 2004-07-06 |
| 6753965 | Defect detection system for quality assurance using automated visual inspection | Kwok-Hung Grantham Pang | 2004-06-22 |
| 6696365 | Process for in-situ etching a hardmask stack | Anisul Khan, Sanjay Thekdi, Dragan Podlesnik | 2004-02-24 |