Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821907 | Etching methods for a magnetic memory cell stack | Jeng H. Hwang, Xiaoyi Chen | 2004-11-23 |
| 6806095 | Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers | Padmapani Nallan, Ajay Kumar | 2004-10-19 |
| 6767824 | Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask | Padmapani Nallan, Ajay Kumar, Wei Liu | 2004-07-27 |
| 6730561 | Method of forming a cup capacitor | Jeng H. Hwang | 2004-05-04 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Mark Kawaguchi, Harald Herchen, Jeng H. Hwang +1 more | 2004-02-17 |