Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821907 | Etching methods for a magnetic memory cell stack | Guangxiang Jin, Xiaoyi Chen | 2004-11-23 |
| 6777342 | Method of plasma etching platinum | — | 2004-08-17 |
| 6770567 | Method of reducing particulates in a plasma etch chamber during a metal etch process | Yong Deuk Ko, Se Jin Oh, Chan Ouk Jung | 2004-08-03 |
| 6749770 | Method of etching an anisotropic profile in platinum | Chentsau Ying, Kang-Lie Chiang, Steve S. Y. Mak | 2004-06-15 |
| 6730561 | Method of forming a cup capacitor | Guangxiang Jin | 2004-05-04 |
| 6709609 | Plasma heating of a substrate with subsequent high temperature etching | Xiaoyi Chen | 2004-03-23 |
| 6692648 | Method of plasma heating and etching a substrate | Xiaoyi Chen | 2004-02-17 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Mark Kawaguchi, Harald Herchen, Guangxiang Jin +1 more | 2004-02-17 |