Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770567 | Method of reducing particulates in a plasma etch chamber during a metal etch process | Yong Deuk Ko, Se Jin Oh, Jeng H. Hwang | 2004-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770567 | Method of reducing particulates in a plasma etch chamber during a metal etch process | Yong Deuk Ko, Se Jin Oh, Jeng H. Hwang | 2004-08-03 |