Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827869 | Method of micromachining a multi-part cavity | Dragan Podlesnik, Thorsten Lill, Jeff Chinn, Anisul Khan, Maocheng Li +1 more | 2004-12-07 |
| 6787054 | Two-stage etching process | Xikun Wang, Scott Williams | 2004-09-07 |
| 6699399 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Arthur Y. Chen, Gerald Yin +5 more | 2004-03-02 |
| 6679981 | Inductive plasma loop enhancing magnetron sputtering | Hiroji Hanawa, John C. Forster, Fusen Chen | 2004-01-20 |