Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783639 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes +2 more | 2004-08-31 |
| 6723214 | Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system | Bradley O. Stimson, Mitsuhiro Kaburaki, Eric Delaurentis, Praburam Gopalraja, Patricia Rodriguez +1 more | 2004-04-20 |
| 6679981 | Inductive plasma loop enhancing magnetron sputtering | Shaoher X. Pan, Hiroji Hanawa, Fusen Chen | 2004-01-20 |
| 6673724 | Pulsed-mode RF bias for side-wall coverage improvement | Praburam Gopalraja, Bradley O. Stimson, Liubo Hong | 2004-01-06 |