Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824658 | Partial turn coil for generating a plasma | Praburam Gopalraja | 2004-11-30 |
| 6723214 | Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system | Mitsuhiro Kaburaki, John C. Forster, Eric Delaurentis, Praburam Gopalraja, Patricia Rodriguez +1 more | 2004-04-20 |
| 6719883 | Use of variable RF generator to control coil voltage distribution | — | 2004-04-13 |
| 6673724 | Pulsed-mode RF bias for side-wall coverage improvement | John C. Forster, Praburam Gopalraja, Liubo Hong | 2004-01-06 |