Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797188 | Self-cleaning process for etching silicon-containing material | Wei-Nan Jiang, Oranna Yauw, Jeffrey D. Chinn | 2004-09-28 |
| 6784110 | Method of etching shaped features on a substrate | Jianping Wen, Hung-Kwei Hu | 2004-08-31 |