Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830950 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, James A. Cooper, Toi Yue Becky Leung | 2004-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830950 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, James A. Cooper, Toi Yue Becky Leung | 2004-12-14 |