Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740601 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Walter Zygmunt | 2004-05-25 |
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Canfeng Lai, Zhengquan Tan, Steve Kim, Alexander Veyster | 2004-01-27 |