Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Canfeng Lai, Zhengquan Tan, Steve Kim | 2004-01-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Canfeng Lai, Zhengquan Tan, Steve Kim | 2004-01-27 |