Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6719818 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2004-04-13 |
| 6676717 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang | 2004-01-13 |