Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6832950 | Polishing pad with window | Jason Wright, Boguslaw A. Swedek | 2004-12-21 |
| 6811466 | System and method for in-line metal profile measurement | Boguslaw A. Swedek, Nils Johansson, Manoocher Birang | 2004-11-02 |
| 6764380 | Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing | Walter Schoenleber, Boguslaw A. Swedek | 2004-07-20 |
| 6716085 | Polishing pad with transparent window | Boguslaw A. Swedek | 2004-04-06 |