Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6796880 | Linear polishing sheet with window | Fred C. Redeker, Manoocher Birang, Shijian Li | 2004-09-28 |
| 6763130 | Real time defect source identification | Amotz Maimon | 2004-07-13 |
| 6729944 | Chemical mechanical polishing apparatus with rotating belt | Manoocher Birang, Lawrence Rosenberg, John M. White | 2004-05-04 |
| 6705924 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | — | 2004-03-16 |