Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776694 | Methods for carrier head with multi-part flexible membrane | Steven M. Zuniga, Hung Chih Chen | 2004-08-17 |
| 6722965 | Carrier head with flexible membranes to provide controllable pressure and loading area | Steven M. Zuniga, Hung Chih Chen | 2004-04-20 |