Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Shijian Li, Feng Q. Liu, Rashid Mavliev +2 more | 2004-11-23 |
| 6776693 | Method and apparatus for face-up substrate polishing | Alain Duboust, Shou-Sung Chang, Liang-Yuh Chen, Yan Wang, Siew Neo +1 more | 2004-08-17 |
| 6739951 | Method and apparatus for electrochemical-mechanical planarization | Stan Tsai, Fred C. Redeker | 2004-05-25 |
| 6709316 | Method and apparatus for two-step barrier layer polishing | Stan Tsai, Shijian Li | 2004-03-23 |
| 6677239 | Methods and compositions for chemical mechanical polishing | Wei-Yung Hsu, Gopalakrishna B. Prabhu, Daniel Carl | 2004-01-13 |