Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811470 | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates | Benjamin A. Bonner, Anand N. Iyer, Deepak Kumar, Thomas H. Osterheld, Yong Sik Kim +2 more | 2004-11-02 |
| 6811680 | Planarization of substrates using electrochemical mechanical polishing | Liang-Yuh Chen, Alain Duboust, Ratson Morad, Daniel Carl | 2004-11-02 |
| 6689686 | System and method for electroplating fine geometries | Richard L. Guldi | 2004-02-10 |
| 6680249 | Si-rich surface layer capped diffusion barriers | Jiong-Ping Lu, Qi-Zhong Hong, Richard Allen Faust | 2004-01-20 |
| 6677232 | Method for fabricating metal conductors and multi-level interconnects in a semiconductor device | Qi-Zhong Hong, Vincent T. Cordasco | 2004-01-13 |
| 6677239 | Methods and compositions for chemical mechanical polishing | Gopalakrishna B. Prabhu, Lizhong Sun, Daniel Carl | 2004-01-13 |