Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811470 | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates | Benjamin A. Bonner, Deepak Kumar, Thomas H. Osterheld, Wei-Yung Hsu, Yong Sik Kim +2 more | 2004-11-02 |