Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834777 | Closed loop control over delivery of liquid material to semiconductor processing tool | Thomas H. Osterheld, Michael W. Richter | 2004-12-28 |
| 6811470 | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates | Anand N. Iyer, Deepak Kumar, Thomas H. Osterheld, Wei-Yung Hsu, Yong Sik Kim +2 more | 2004-11-02 |