Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834777 | Closed loop control over delivery of liquid material to semiconductor processing tool | Benjamin A. Bonner, Michael W. Richter | 2004-12-28 |
| 6824455 | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus | Sen-Hou Ko | 2004-11-30 |
| 6811470 | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates | Benjamin A. Bonner, Anand N. Iyer, Deepak Kumar, Wei-Yung Hsu, Yong Sik Kim +2 more | 2004-11-02 |
| 6699115 | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus | Sen-Hou Ko | 2004-03-02 |