Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811680 | Planarization of substrates using electrochemical mechanical polishing | Liang-Yuh Chen, Wei-Yung Hsu, Ratson Morad, Daniel Carl | 2004-11-02 |
| 6776693 | Method and apparatus for face-up substrate polishing | Shou-Sung Chang, Liang-Yuh Chen, Yan Wang, Siew Neo, Lizhong Sun +1 more | 2004-08-17 |
| 6773507 | Apparatus and method for fast-cycle atomic layer deposition | Ravi Jallepally, Shih-Hung Li, Jun Zhao, Liang-Yuh Chen, Daniel Carl | 2004-08-10 |