Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773507 | Apparatus and method for fast-cycle atomic layer deposition | Ravi Jallepally, Alain Duboust, Jun Zhao, Liang-Yuh Chen, Daniel Carl | 2004-08-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773507 | Apparatus and method for fast-cycle atomic layer deposition | Ravi Jallepally, Alain Duboust, Jun Zhao, Liang-Yuh Chen, Daniel Carl | 2004-08-10 |