Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu +2 more | 2004-11-23 |
| 6811680 | Planarization of substrates using electrochemical mechanical polishing | Liang-Yuh Chen, Wei-Yung Hsu, Alain Duboust, Ratson Morad | 2004-11-02 |
| 6773507 | Apparatus and method for fast-cycle atomic layer deposition | Ravi Jallepally, Shih-Hung Li, Alain Duboust, Jun Zhao, Liang-Yuh Chen | 2004-08-10 |
| 6677239 | Methods and compositions for chemical mechanical polishing | Wei-Yung Hsu, Gopalakrishna B. Prabhu, Lizhong Sun | 2004-01-13 |