Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu +2 more | 2004-11-23 |
| 6811680 | Planarization of substrates using electrochemical mechanical polishing | Liang-Yuh Chen, Wei-Yung Hsu, Alain Duboust, Daniel Carl | 2004-11-02 |