Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620724 | Low resistivity deep trench fill for DRAM and EDRAM applications | Helmut Tews, Irene McStay, Manfred Hauf, Matthias Goldbach, Bernhard Sell +5 more | 2003-09-16 |
| 6613642 | Method for surface roughness enhancement in semiconductor capacitor manufacturing | Stephen Rahn, Irene McStay, Helmut Tews, Stephan Kudelka, Rajarao Jammy | 2003-09-02 |
| 6605396 | Resolution enhancement for alternating phase shift masks | Tobias Mono, Veit Klee | 2003-08-12 |
| 6605860 | Semiconductor structures and manufacturing methods | Helmut Tews, Alexander Michaelis, Stephan Kudelka, Raj Jammy, Ulrike Gruening | 2003-08-12 |
| 6605838 | Process flow for thick isolation collar with reduced length | Jack A. Mandelman, Rama Divakaruni, Gerd Fehlauer, Stephan Kudelka, Helmut Tews | 2003-08-12 |
| 6599798 | Method of preparing buried LOCOS collar in trench DRAMS | Helmut Tews, Stephan Kudelka, Rolf Weis | 2003-07-29 |
| 6590657 | Semiconductor structures and manufacturing methods | Christian Summerer, Shahid Butt, Gerhard Kunkel | 2003-07-08 |
| 6576550 | ‘Via first’ dual damascene process for copper metallization | Gabriela Brase, Karen L. Holloway | 2003-06-10 |
| 6559002 | Rough oxide hard mask for DT surface area enhancement for DT DRAM | Stephan Kudelka, Helmut Tews, Stephen Rahn, Irene McStay | 2003-05-06 |
| 6548357 | Modified gate processing for optimized definition of array and logic devices on same chip | Mary E. Weybright, Gary B. Bronner, Richard A. Conti, Ramachandra Divakaruni, Jeffrey P. Gambino +1 more | 2003-04-15 |
| 6540938 | Liquid crystalline light-modulating device | Ali Afzali-Arkadani, Glenn Allen Held, Anthony Cyril Lowe, Robert D. Miller, Robert J. Twieg +1 more | 2003-04-01 |