Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667504 | Self-aligned buried strap process using doped HDP oxide | Jochen Beintner, Wolfgang Bergner, Richard A. Conti, Andreas Knorr | 2003-12-23 |
| 6610573 | Method for forming a single wiring level for transistors with planar and vertical gates on the same substrate | — | 2003-08-26 |
| 6599798 | Method of preparing buried LOCOS collar in trench DRAMS | Helmut Tews, Stephan Kudelka, Uwe Schroeder | 2003-07-29 |
| 6576944 | Self-aligned nitride pattern for improved process window | — | 2003-06-10 |
| 6544855 | Process flow for sacrificial collar with polysilicon void | Helmut Tews, Irene McStay | 2003-04-08 |