Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667504 | Self-aligned buried strap process using doped HDP oxide | Wolfgang Bergner, Richard A. Conti, Andreas Knorr, Rolf Weis | 2003-12-23 |
| 6620676 | Structure and methods for process integration in vertical DRAM cell fabrication | Rajeev Malik, Larry Nesbit, Rama Divakaruni | 2003-09-16 |
| 6607984 | Removable inorganic anti-reflection coating process | Gill Yong Lee, Scott D. Halle | 2003-08-19 |
| 6602745 | Field effect transistor and method of fabrication | Peter Thwaite | 2003-08-05 |
| 6579768 | Field effect transistor and method of fabrication | Peter Thwaite | 2003-06-17 |
| 6579759 | Formation of self-aligned buried strap connector | Michael P. Chudzik, Ramachandra Divakaruni, Rajarao Jammy | 2003-06-17 |
| 6566228 | Trench isolation processes using polysilicon-assisted fill | Rama Divakaruni, Jack A. Mandelman, Andreas Knorr | 2003-05-20 |
| 6548344 | Spacer formation process using oxide shield | Stephan Kudelka, Thomas W. Dyer | 2003-04-15 |
| 6534369 | Field effect transistor and method of fabrication | Peter Thwaite | 2003-03-18 |