Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664161 | Method and structure for salicide trench capacitor plate electrode | Michael P. Chudzik, Jack A. Mandelman, Carl Radens, Kenneth T. Settlemyer, Jr., Padraic Shafer +1 more | 2003-12-16 |
| 6653678 | Reduction of polysilicon stress in trench capacitors | Dureseti Chidambarrao, Jack A. Mandelman | 2003-11-25 |
| 6620724 | Low resistivity deep trench fill for DRAM and EDRAM applications | Uwe Schroeder, Helmut Tews, Irene McStay, Manfred Hauf, Matthias Goldbach +5 more | 2003-09-16 |
| 6613642 | Method for surface roughness enhancement in semiconductor capacitor manufacturing | Stephen Rahn, Irene McStay, Helmut Tews, Uwe Schroeder, Stephan Kudelka | 2003-09-02 |
| 6583462 | Vertical DRAM having metallic node conductor | Toshiharu Furukawa, Thomas S. Kanarsky, Jeffrey J. Welser, David V. Horak, Steven J. Holmes +1 more | 2003-06-24 |
| 6579759 | Formation of self-aligned buried strap connector | Michael P. Chudzik, Jochen Beintner, Ramachandra Divakaruni | 2003-06-17 |
| 6555430 | Process flow for capacitance enhancement in a DRAM trench | Michael P. Chudzik, Johnathan E. Faltermeier, Stephan Kudelka, Irene McStay, Kenneth T. Settlemyer, Jr. +1 more | 2003-04-29 |
| 6544874 | Method for forming junction on insulator (JOI) structure | Jack A. Mandelman, Kevin K. Chan, Bomy Chen, Oleg Gluschenkov, Victor Ku +2 more | 2003-04-08 |
| 6518119 | Strap with intrinsically conductive barrier | Jeffrey P. Gambino, Jack A. Mandelman, Carl Radens | 2003-02-11 |
| 6512266 | Method of fabricating SiO2 spacers and annealing caps | Sadanand V. Deshpande, Bruce B. Doris, William H. Ma | 2003-01-28 |