Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667197 | Method for differential oxidation rate reduction for n-type and p-type materials | Bruce B. Doris, Omer H. Dokumaci | 2003-12-23 |
| 6656798 | Gate processing method with reduced gate oxide corner and edge thinning | Helmut Tews, Mary E. Weybright | 2003-12-02 |
| 6576565 | RTCVD process and reactor for improved conformality and step-coverage | Ashima B. Chakravarti, Irene McStay | 2003-06-10 |
| 6566210 | Method of improving gate activation by employing atomic oxygen enhanced oxidation | Atul Ajmera, Omer H. Dokumaci, Bruce B. Doris | 2003-05-20 |
| 6555166 | Method for reducing the microloading effect in a chemical vapor deposition reactor | Ashima B. Chakravarti | 2003-04-29 |
| 6544874 | Method for forming junction on insulator (JOI) structure | Jack A. Mandelman, Kevin K. Chan, Bomy Chen, Rajarao Jammy, Victor Ku +2 more | 2003-04-08 |
| 6514843 | Method of enhanced oxidation of MOS transistor gate corners | Omer H. Dokumaci, Suryanarayan G. Hegde, Richard D. Kaplan, Mukesh V. Khare | 2003-02-04 |
| 6509221 | Method for forming high performance CMOS devices with elevated sidewall spacers | Bruce B. Doris, Omer H. Dokumaci | 2003-01-21 |