Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576565 | RTCVD process and reactor for improved conformality and step-coverage | Oleg Gluschenkov, Irene McStay | 2003-06-10 |
| 6555166 | Method for reducing the microloading effect in a chemical vapor deposition reactor | Oleg Gluschenkov | 2003-04-29 |
| 6528383 | Simultaneous formation of deep trench capacitor and resistor | Satya N. Chakravarti, Irene McStay, Kwong Hon Wong | 2003-03-04 |