Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635517 | Use of disposable spacer to introduce gettering in SOI layer | Tze-Chiang Chen, Thomas T. Hwang, Effendi Leobandung, Anda C. Mocuta, Paul A. Ronsheim +1 more | 2003-10-21 |
| 6569781 | Method of forming an ultra-thin oxide layer on a silicon substrate by implantation of nitrogen through a sacrificial layer and subsequent annealing prior to oxide formation | Omer H. Dokumaci, Richard D. Kaplan, Suryanarayan G. Hegde | 2003-05-27 |
| 6514843 | Method of enhanced oxidation of MOS transistor gate corners | Omer H. Dokumaci, Oleg Gluschenkov, Suryanarayan G. Hegde, Richard D. Kaplan | 2003-02-04 |