Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569781 | Method of forming an ultra-thin oxide layer on a silicon substrate by implantation of nitrogen through a sacrificial layer and subsequent annealing prior to oxide formation | Omer H. Dokumaci, Richard D. Kaplan, Mukesh V. Khare | 2003-05-27 |
| 6514843 | Method of enhanced oxidation of MOS transistor gate corners | Omer H. Dokumaci, Oleg Gluschenkov, Richard D. Kaplan, Mukesh V. Khare | 2003-02-04 |