Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642156 | Method for forming heavy nitrogen-doped ultra thin oxynitride gate dielectrics | Evgeni Gousev, Christopher P. D'Emic | 2003-11-04 |
| 6605521 | Method of forming an oxide film on a gate side wall of a gate structure | Karanam Balasubramanyam, Tomio Katata, Shang-Bin Ko | 2003-08-12 |
| 6602759 | Shallow trench isolation for thin silicon/silicon-on-insulator substrates by utilizing polysilicon | Klaus D. Beyer, Dominic J. Schepis | 2003-08-05 |
| 6566210 | Method of improving gate activation by employing atomic oxygen enhanced oxidation | Omer H. Dokumaci, Bruce B. Doris, Oleg Gluschenkov | 2003-05-20 |
| 6566198 | CMOS structure with non-epitaxial raised source/drain and self-aligned gate and method of manufacture | Heemyong Park, Fariborz Assaderaghi, Ghavam G. Shahidi | 2003-05-20 |
| 6521947 | Method of integrating substrate contact on SOI wafers with STI process | Effendi Leobandung, Werner Rausch, Dominic J. Schepis, Ghavam G. Shahidi | 2003-02-18 |
| 6506649 | Method for forming notch gate having self-aligned raised source/drain structure | Ka-Hing Fung, Victor Ku, Dominic J. Schepis | 2003-01-14 |
| 6503833 | Self-aligned silicide (salicide) process for strained silicon MOSFET ON SiGe and structure formed thereby | Cyril Cabral, Jr., Roy A. Carruthers, Kevin K. Chan, Guy M. Cohen, Paul Kozlowski +3 more | 2003-01-07 |