Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605521 | Method of forming an oxide film on a gate side wall of a gate structure | Atul Ajmera, Karanam Balasubramanyam, Shang-Bin Ko | 2003-08-12 |
| 6566632 | Hot plate and semiconductor device manufacturing method using the same | Nobuo Hayasaka, Katsuya Okumura | 2003-05-20 |
| 6521010 | Filter, filtering frame, and semiconductor device manufacturing method and apparatus | — | 2003-02-18 |
| 6521927 | Semiconductor device and method for the manufacture thereof | Osamu Hidaka, Sumito Ootsuki, Hiroshi Mochizuki, Hiroyuki Kanaya, Kumi Okuwada +2 more | 2003-02-18 |