Issued Patents 2003
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660091 | Apparatus for forming liquid film | Shinichi Ito | 2003-12-09 |
| 6646268 | Ion generation method and filament for ion generation apparatus | Atsushi Murakoshi, Kyoichi Suguro | 2003-11-11 |
| 6633045 | Assembly part with wiring and for manufacturing system, method of manufacturing such assembly part, and semiconductor manufacturing system constituted using assembly part | Kazuyoshi Sugihara, Atsushi Ando | 2003-10-14 |
| 6632335 | Plating apparatus | Junji Kunisawa, Mitsuko Odagaki, Natsuki Makino, Koji Mishima, Kenji Nakamura +7 more | 2003-10-14 |
| 6614033 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Kyoichi Suguro, Atsushi Murakoshi | 2003-09-02 |
| 6609950 | Method for polishing a substrate | Norio Kimura, Yu Ishii, Hirokuni Hiyama, Hiroyuki Yano | 2003-08-26 |
| 6608356 | Semiconductor device using damascene technique and manufacturing method therefor | Yusuke Kohyama, Nobuo Hayasaka | 2003-08-19 |
| 6570169 | Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device | Kyoichi Suguro | 2003-05-27 |
| 6566632 | Hot plate and semiconductor device manufacturing method using the same | Tomio Katata, Nobuo Hayasaka | 2003-05-20 |
| 6547638 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Riichirou Aoki, Hiromi Yajima, Seiji Ishikawa, Manabu Tsujimura | 2003-04-15 |
| 6544804 | Semiconductor wafer having identification indication and method of manufacturing the same | Hiroyuki Yano | 2003-04-08 |
| 6538323 | Semiconductor device having an electrode structure comprising a conductive fine particle film | Atsuko Sakata, Keiichi Sasaki, Nobuo Hayasaka, Hirotaka Nishino | 2003-03-25 |
| 6528128 | Method of treating a substrate | Shinichi Ito | 2003-03-04 |
| 6525328 | Electron beam lithography system and pattern writing method | Motosuke Miyoshi, Yuichiro Yamazaki | 2003-02-25 |
| 6515296 | Pattern dimension measuring system and pattern dimension measuring method | Fumio Komatsu, Motosuke Miyoshi | 2003-02-04 |
| 6508695 | Pure water reusing system | Mutsumi Tanikawa, Mitsunori Komatsu, Kiyotaka Kawashima, Hiroshi Shimomoto | 2003-01-21 |
| 6504227 | Passive semiconductor device mounted as daughter chip on active semiconductor device | Mie Matsuo, Nobuo Hayasaka, Noriaki Matsunaga | 2003-01-07 |