Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646268 | Ion generation method and filament for ion generation apparatus | Atsushi Murakoshi, Katsuya Okumura | 2003-11-11 |
| 6614033 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Atsushi Murakoshi, Katsuya Okumura | 2003-09-02 |
| 6607958 | Semiconductor device and method of manufacturing the same | — | 2003-08-19 |
| 6586837 | Sputtering target and method of manufacturing a semiconductor device | — | 2003-07-01 |
| 6570169 | Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device | Katsuya Okumura | 2003-05-27 |
| 6541393 | Method for fabricating semiconductor device | Taro Sugizaki, Toshiro Nakanishi, Atsushi Murakoshi | 2003-04-01 |
| 6541829 | Semiconductor device and method of manufacturing the same | Kazumi Nishinohara, Yasushi Akasaka | 2003-04-01 |