Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646268 | Ion generation method and filament for ion generation apparatus | Kyoichi Suguro, Katsuya Okumura | 2003-11-11 |
| 6614033 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Kyoichi Suguro, Katsuya Okumura | 2003-09-02 |
| 6541393 | Method for fabricating semiconductor device | Taro Sugizaki, Toshiro Nakanishi, Kyoichi Suguro | 2003-04-01 |