Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563308 | Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium | Osamu Nagano, Motosuke Miyoshi, Hisashi Kaneko, Tetsuo Matsuda | 2003-05-13 |
| 6534766 | Charged particle beam system and pattern slant observing method | Hideaki Abe, Kazuyoshi Sugihara, Masahiro Inoue | 2003-03-18 |
| 6525328 | Electron beam lithography system and pattern writing method | Motosuke Miyoshi, Katsuya Okumura | 2003-02-25 |
| 6512237 | Charged beam exposure method and charged beam exposure apparatus | Tetsuro Nakasugi, Hideaki Abe | 2003-01-28 |