Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563114 | Substrate inspecting system using electron beam and substrate inspecting method using electron beam | Ichirota Nagahama, Yuuichiro Yamazaki, Takamitsu Nagai | 2003-05-13 |
| 6563308 | Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium | Osamu Nagano, Yuichiro Yamazaki, Hisashi Kaneko, Tetsuo Matsuda | 2003-05-13 |
| 6525328 | Electron beam lithography system and pattern writing method | Yuichiro Yamazaki, Katsuya Okumura | 2003-02-25 |
| 6515296 | Pattern dimension measuring system and pattern dimension measuring method | Fumio Komatsu, Katsuya Okumura | 2003-02-04 |