Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633045 | Assembly part with wiring and for manufacturing system, method of manufacturing such assembly part, and semiconductor manufacturing system constituted using assembly part | Atsushi Ando, Katsuya Okumura | 2003-10-14 |
| 6534766 | Charged particle beam system and pattern slant observing method | Hideaki Abe, Yuichiro Yamazaki, Masahiro Inoue | 2003-03-18 |