Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626739 | Polishing method and polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2003-09-30 |
| 6609950 | Method for polishing a substrate | Norio Kimura, Yu Ishii, Katsuya Okumura, Hiroyuki Yano | 2003-08-26 |
| 6595831 | Method for polishing workpieces using fixed abrasives | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo, Noburu Shimizu | 2003-07-22 |
| 6579148 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo, Tetsuji Togawa | 2003-06-17 |
| 6520845 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo | 2003-02-18 |