Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6609950 | Method for polishing a substrate | Norio Kimura, Hirokuni Hiyama, Katsuya Okumura, Hiroyuki Yano | 2003-08-26 |
| 6544111 | Polishing apparatus and polishing table therefor | Norio Kimura | 2003-04-08 |