Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626739 | Polishing method and polishing apparatus | Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa | 2003-09-30 |
| 6595831 | Method for polishing workpieces using fixed abrasives | Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Noburu Shimizu | 2003-07-22 |
| 6579148 | Polishing apparatus | Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Tetsuji Togawa | 2003-06-17 |
| 6520845 | Polishing apparatus | Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada | 2003-02-18 |